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Canon FPA 3000 iw/ i4/ i5
On-site service
Contract
Parts supply
Parts Repair
On sale parts
Color monitor upgrade
Zygo Laser refurbishment
Fiber Cable
Optical LENS refurbish or sale
提供完整裝機 維修 保固等服務
Parts for sale list
Parts for sale list
BG4-6746 WF/RC IF
BG3-2090 M-POS
BG4-6633 TV-Backplane
UED2-238 Reticle robot control PCB
BG4-6974 ECD PCB
AKK-Driver
BG3-1041 RF CPU
BG4-9031 power amp PCB
BG4-9032 power amp PCB
BG4-6789 LD/PD PCB
BG4-9307 DSP8901-03
BG4-6793 WF SCH/EL PCB
BG4-9193 FINE Sensor (KAMAN, SMU9000-1U1)
KAMAN Measuring system sensor, KDM7200-IUI
KAMAN PIN Sensor (KAMAN) cable
FINE Theta cable
BG3-2462 MAIN CPU
BG3-2521 FZANA2
BG4-6476 MB (Theta)
BG4-9218 MLE 中繼板
BG4-6974 ECD PCB
BG4-6457 XY-PRE
BG4-6789 LD/PD PCB
BG4-9153 Head AMP
BG4-9154 STG-BX
BG3-3118 Head AMP for EX5
BG4-9191 XY-PRE2
BG4-6629 STG CPU
HP Keyboard/Mouse MODULE
CETRECOM LAN box, MX10
HP HP28685B, Ehternet Twist Tranceiver
HP A4308-66001
BEAN Spliter Port
BG3-1407 IP PCB
BG4-6974 ECD PCB
BG4-8539 IL1 PCB
BG4-9745 OFCD I/F
BG4-8815 CDIF-2
LENS ND filter 5%/10%/16% 20% 25% 31%
motor
Orental, PK545NAWA
SANMOTION T406-011ELS
LEC-234402 100/20
LAN HP 25567-60003
OMRON S82S-0705 T
Panasonic MQ-WNTOA-DC12-24V
BM9-7376
Mirror: Half mirror takeout
Magnet
99-1194 (STAGE)
99-1195 (STAGE)
99-1196 (STAGE)
BG4-6746 WF/RC IF
BG3-2090 M-POS
BG4-6633 TV-Backplane
UED2-238 Reticle robot control PCB
BG4-6974 ECD PCB
AKK-Driver
BG3-1041 RF CPU
BG4-9031 power amp PCB
BG4-9032 power amp PCB
BG4-6789 LD/PD PCB
BG4-9307 DSP8901-03
BG4-6794 WF SCH/EL PCB
BG4-9193 FINE Sensor (KAMAN, SMU9000-1U1)
KAMAN Measuring system sensor, KDM7200-IUI
KAMAN PIN Sensor (KAMAN) cable
NA FINE Theta cable
BG3-2462 MAIN CPU
BG3-2521 FZANA2
BG4-6467 MB (Theta)
BG4-9218 MLE 中繼板
BG4-6974 ECD PCB
BG4-6457 XY-PRE
BG4-6789 LD/PD PCB
BG4-9153 Head AMP
BG4-9154 STG-BX
BG3-3118 Head AMP for EX5
BG4-9191 XY-PRE2
BG4-6629 STG CPU
HP Keyboard/Mouse MODULE
CETRECOM LAN box, MX10
HP HP28685B, Ehternet Twist Tranceiver
HP A4308-66001
NA BEAN Spliter Port
BG3-1407 IP PCB
BG4-6974 ECD PCB
BG4-8539 IL1 PCB
BG4-9745 OFCD I/F
BG4-8815 CDIF-2
LENS ND filter 5%/10%/16% 20% 25% 31%
motor Orental, PK545NAWA
motor SANMOTION T406-011ELS
motor LEC-234402 100/20
LAN HP 25567-60003
OMRON S82S-0705 T
Panasonic MQ-WNTOA-DC12-24V
BM9-7376 PS0171, Half mirror takeout
Magnet 99-1194 (STAGE)
Magnet 99-1195 (STAGE)
Magnet 99-1196 (STAGE)
BG4-8193 Liberary PCB
BG3-1360 Reticle robot control PCB
BH2-0662 Wafer feeder Y motor
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